{"created":"2023-05-15T11:46:23.807644+00:00","id":6925,"links":{},"metadata":{"_buckets":{"deposit":"e86326a4-2b6d-4eda-9a8c-c8dda37daf67"},"_deposit":{"created_by":1,"id":"6925","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"6925"},"status":"published"},"_oai":{"id":"oai:kanagawa-u.repo.nii.ac.jp:00006925","sets":["376:377:378:556"]},"author_link":["20716","20713","20711","20714","20712","20717","20715","20718"],"item_3_alternative_title_20":{"attribute_name":"その他の言語のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Research for Formation of High-Quality Diamond Epitaxial Thin Layers on the Diamond Substrates and Evaluation of These Layers"}]},"item_3_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2006-05-25","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"75","bibliographicPageStart":"63","bibliographicVolumeNumber":"17","bibliographic_titles":[{"bibliographic_title":"Science Journal of Kanagawa University"}]}]},"item_3_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"We have developed a microwave-plasma CVD apparatus for depositing epitaxial diamond layers on the diamond substrates. We used Ib-type substrates and succeeded in depositing high-quality diamond epitaxial layers on these substrates, confirmed by measuring Raman shift spectra and the electrical characteristics of CVD layers using a Hall effect measuring instrument. However, the surface morphology of the deposited layers is not so good, as ascertained by Atomic Force Microprobe. We also measured impurity profiles in the CVD layers, using Secondary Ion Mass Spectroscopy. Moreover, we found an abrupt concentration difference of N impurity at the interface between the deposited layer and the substrate, showing that the concentration of N impurity is lower in the CVD layer than in the substrate.","subitem_description_type":"Abstract"}]},"item_3_publisher_33":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"神奈川大学"}]},"item_3_source_id_10":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA12068302","subitem_source_identifier_type":"NCID"}]},"item_3_source_id_8":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"1880-0483","subitem_source_identifier_type":"ISSN"}]},"item_3_version_type_16":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"中田, 穣治"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"斎藤, 保直"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"川崎, 克則"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"服部, 俊幸"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Nakata, Jyoji"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Saito, Yasunao"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Kawasaki, Katsunori"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Hattori, Toshiyuki"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-11-20"}],"displaytype":"detail","filename":"SJKU Vol 17 63-75.pdf","filesize":[{"value":"1.7 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"SJKU Vol 17 63-75.pdf","url":"https://kanagawa-u.repo.nii.ac.jp/record/6925/files/SJKU Vol 17 63-75.pdf"},"version_id":"7699e072-b86d-43b4-a28f-2c213114c3f6"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"microwave-plasma","subitem_subject_scheme":"Other"},{"subitem_subject":"CVD","subitem_subject_scheme":"Other"},{"subitem_subject":"diamond","subitem_subject_scheme":"Other"},{"subitem_subject":"epitaxial layerx","subitem_subject_scheme":"Other"},{"subitem_subject":"epitaxial layer","subitem_subject_scheme":"Other"},{"subitem_subject":"Hall-effect","subitem_subject_scheme":"Other"},{"subitem_subject":"AFM","subitem_subject_scheme":"Other"},{"subitem_subject":"SIMS","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"高品質ダイヤモンド薄膜の形成と評価の研究(2005年度神奈川大学総合理学研究所協同研究助成論文)","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"高品質ダイヤモンド薄膜の形成と評価の研究(2005年度神奈川大学総合理学研究所協同研究助成論文)"}]},"item_type_id":"3","owner":"1","path":["556"],"pubdate":{"attribute_name":"公開日","attribute_value":"2009-02-23"},"publish_date":"2009-02-23","publish_status":"0","recid":"6925","relation_version_is_last":true,"title":["高品質ダイヤモンド薄膜の形成と評価の研究(2005年度神奈川大学総合理学研究所協同研究助成論文)"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T15:45:23.241566+00:00"}