{"created":"2023-09-13T01:29:26.698437+00:00","id":2000081,"links":{},"metadata":{"_buckets":{"deposit":"0ba3ba03-0075-48ee-8f0f-d55d54bd9361"},"_deposit":{"created_by":10,"id":"2000081","owner":"10","owners":[10],"pid":{"revision_id":0,"type":"depid","value":"2000081"},"status":"published"},"_oai":{"id":"oai:kanagawa-u.repo.nii.ac.jp:02000081","sets":["376:377:378:1694564780134"]},"author_link":["33602","33602"],"item_3_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2023-07-30","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"7","bibliographicPageStart":"1","bibliographicVolumeNumber":"34","bibliographic_titles":[{"bibliographic_title":"Science Journal of Kanagawa University"},{"bibliographic_title":"Science Journal of Kanagawa University","bibliographic_titleLang":"en"}]}]},"item_3_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Formation of highly controlled p-type and n-type conductive layers in diamond by ion implantation technique has been strongly desired for realizing diamond-based electronic devices for decades; however practically available doping condition has not been found especially in n-type doping. In this study, we comprehensively determined the local structures and depth profiles of implanted P atoms as n-type dopant to find out the origin of inactivation of implanted P atoms. The local structure around the implanted P atoms was analyzed by X-ray absorption fine structure using synchrotron-radiation-light and the first-principle calculation based on density functional theory. We found at least four components for all prepared samples in the near edge X-ray absorption structure, suggesting that implanted P atoms locate in four different chemical environments. We eventually assigned all the components by comparing the simulated X-ray absorption with the first-principle theoretical calculation: one of the components corresponds to active phosphorus atom in the substitutional site, and others are the elemental P-P bonds and some defect complexes probably acting as inactive species for n-type dopant. These facts suggest that the knowledge of local structure of implanted P atoms and control of them are substantially important to reduce the inactivation factors of the implanted dopants.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_3_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"Full-Length Paper　By a grant from Research Institute for Integrated Science, Kanagawa University","subitem_description_language":"en","subitem_description_type":"Other"}]},"item_3_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24792/0002000081","subitem_identifier_reg_type":"JaLC"}]},"item_3_publisher_33":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"神奈川大学総合理学研究所","subitem_publisher_language":"ja"},{"subitem_publisher":"Research Institute for Integrated Science, Kanagawa University","subitem_publisher_language":"en"}]},"item_3_source_id_10":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA12068302","subitem_source_identifier_type":"NCID"}]},"item_3_source_id_8":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"1880-0483","subitem_source_identifier_type":"PISSN"}]},"item_3_version_type_16":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Hoshino, Yasushi","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"33602","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"33602","nameIdentifierScheme":"ローカル著者ID"}]},{"creatorNames":[{"creatorName":"Yuhei Seki","creatorNameLang":"en"}]},{"creatorNames":[{"creatorName":"Mitsuhara, Kei","creatorNameLang":"en"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_access","date":[{"dateType":"Available","dateValue":"2023-09-14"}],"filename":"01 Local Atomic Structures around Implanted Phosphorus Atoms in Diamond Analyzed by X-ray Absorption Near Edge Structure.pdf","filesize":[{"value":"2.7 MB"}],"format":"application/pdf","mimetype":"application/pdf","url":{"url":"https://kanagawa-u.repo.nii.ac.jp/record/2000081/files/01 Local Atomic Structures around Implanted Phosphorus Atoms in Diamond Analyzed by X-ray Absorption Near Edge Structure.pdf"},"version_id":"3a4281e6-a30d-43a1-9189-fda3eb374cb2"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"ion implantation doping,","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"chemical bonding structure,","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"synchrotron radiation light","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"X-ray absorption fine structure","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"DFT calculation","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Local Atomic Structures around Implanted Phosphorus Atoms in Diamond Analyzed by X-ray Absorption Near Edge Structure","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Local Atomic Structures around Implanted Phosphorus Atoms in Diamond Analyzed by X-ray Absorption Near Edge Structure","subitem_title_language":"en"}]},"item_type_id":"3","owner":"10","path":["1694564780134"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2023-09-13"},"publish_date":"2023-09-13","publish_status":"0","recid":"2000081","relation_version_is_last":true,"title":["Local Atomic Structures around Implanted Phosphorus Atoms in Diamond Analyzed by X-ray Absorption Near Edge Structure"],"weko_creator_id":"10","weko_shared_id":-1},"updated":"2023-10-11T00:15:22.537784+00:00"}